Localized bond states and quantum size effect in SiNx/p-Si(200) thin films deposited by rf-reactive sputtering method
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김은규 | - |
dc.date.accessioned | 2021-08-04T07:55:02Z | - |
dc.date.available | 2021-08-04T07:55:02Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2002-08-20 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77841 | - |
dc.publisher | Korean Physical Society | - |
dc.title | Localized bond states and quantum size effect in SiNx/p-Si(200) thin films deposited by rf-reactive sputtering method | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 김은규 | - |
dc.identifier.bibliographicCitation | 11th Seoul Inter. Symp. on Phys. of Semicond. & Appl.(ISPSA)-2002 | - |
dc.relation.isPartOf | 11th Seoul Inter. Symp. on Phys. of Semicond. & Appl.(ISPSA)-2002 | - |
dc.citation.title | 11th Seoul Inter. Symp. on Phys. of Semicond. & Appl.(ISPSA)-2002 | - |
dc.citation.conferencePlace | Cheju, Korea | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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