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유기소스 원자층 증착법으로증착된 TiN 박막의 특성 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T08:21:08Z | - |
| dc.date.available | 2021-08-04T08:21:08Z | - |
| dc.date.issued | 20020517 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/78207 | - |
| dc.title | 유기소스 원자층 증착법으로증착된 TiN 박막의 특성 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2002 한국재료학회 춘계학술발표대회 | - |
| dc.citation.conferencePlace | 한양대학교(안산) 제1과학기술관 및 백남학술관 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)