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W-CMP용 실리카 연마입자의 공정 특성 연구
- Authors
- 백운규
- Issue Date
- 19-Apr-2002
- Place
- 서울시립대학교
- Conference Name
- 2002년도 춘계 한국세라믹학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)