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Comparison of TiN thin films deposited by metal organic atomic layer deposition (MOALD) using TDMAT and TDEAT
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T08:24:49Z | - |
| dc.date.available | 2021-08-04T08:24:49Z | - |
| dc.date.issued | 2002-04-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/78461 | - |
| dc.title | Comparison of TiN thin films deposited by metal organic atomic layer deposition (MOALD) using TDMAT and TDEAT | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | MRS 2002 spring meeting | - |
| dc.citation.conferencePlace | SAN FRANCISCO | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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