Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
저온 원거리 플라즈마를 이용한 Si 기판의 유기오염물 제거
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T09:18:32Z | - |
| dc.date.available | 2021-08-04T09:18:32Z | - |
| dc.date.issued | 20010427 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/79652 | - |
| dc.title | 저온 원거리 플라즈마를 이용한 Si 기판의 유기오염물 제거 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2001년도 봄 학술대회 | - |
| dc.citation.conferencePlace | 연세대학교 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)