Off-axis Si(100) 기판에서의 화학적 산화막을 이용한 Co-sillicide 성장에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2021-08-04T09:51:21Z | - |
dc.date.available | 2021-08-04T09:51:21Z | - |
dc.date.issued | 20000126 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/80803 | - |
dc.title | Off-axis Si(100) 기판에서의 화학적 산화막을 이용한 Co-sillicide 성장에 관한 연구 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 제7회 한국 반도체 학술대회 | - |
dc.citation.conferencePlace | 고려대학교 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.