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원자층 증착법으로 형성한 TiN 박막의 특성 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T10:23:00Z | - |
| dc.date.available | 2021-08-04T10:23:00Z | - |
| dc.date.issued | 1999-05-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/81453 | - |
| dc.title | 원자층 증착법으로 형성한 TiN 박막의 특성 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국 재료학회 춘계 학술대회 | - |
| dc.citation.conferencePlace | 금오공대 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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