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The reduction for the transition temperature of TiSi2 through a Ta Interlayer

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dc.contributor.author전형탁-
dc.date.accessioned2021-08-04T10:33:24Z-
dc.date.available2021-08-04T10:33:24Z-
dc.date.issued1999-02-01-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/81647-
dc.titleThe reduction for the transition temperature of TiSi2 through a Ta Interlayer-
dc.typeConference-
dc.citation.conferenceName한국반도체 학술대회-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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