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Electromigration Study of Al Thin FilmsDeposited on Low Dielectric Polyimide and SiO2 ILD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김영호 | - |
| dc.date.accessioned | 2021-08-04T10:49:29Z | - |
| dc.date.available | 2021-08-04T10:49:29Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 1998-08-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/82210 | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | Electromigration Study of Al Thin FilmsDeposited on Low Dielectric Polyimide and SiO2 ILD | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김영호 | - |
| dc.identifier.bibliographicCitation | IUMRS-ICEM-98 | - |
| dc.relation.isPartOf | IUMRS-ICEM-98 | - |
| dc.citation.title | IUMRS-ICEM-98 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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