Shape Optimization for a Single Valve Vacuum Chuck Using Two-Way FSI Analysis

Abstract

This study aims to optimize the inner shape of a single valve vacuum chuck to prevent flexible film from wrinkling and shorten the inspect time. Hence, this study developed a two-way fluid-structure interaction (FSI) analysis between the film and its surrounding airflow to simulate film adsorption in a porous ceramic on a single vacuum chuck. Next, the team optimized airflow velocity for the film to achieve the quickest adsorption of the porous ceramic sample in the shortest time. Finally, the vacuum chuck shape was optimized using the optimum airflow velocity profile. The Darcy-Forchheimer and Mooney-Rivlin equations were simulated to calculate the airflow through the porous ceramic and the hyper-elastic material, respectively. The B-spline curve was used to optimize the inner shape of the vacuum chuck. Adsorption tests of single- and multiple-valve vacuum chucks with optimized internal shapes were performed to verify the validity of the simulation results and compare the performance. The optimized vacuum chuck prevented film wrinkling, and the inspection time was reduced by 66% compared to the conventional multiple-valve vacuum chuck. The error between the simulation and the experimental results was within 2.5%. The techniques of the developed two-way FSI analysis and the vacuum chuck shape optimization will greatly contribute to the display and semiconductor industries.