Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Effect of a protective shape upstream a sensor on reducing dust particle contamination of critical sensor surface

Full metadata record
DC Field Value Language
dc.contributor.authorNoh, Seung-Yoon-
dc.contributor.authorZahir, Muhammad Zeeshan-
dc.contributor.authorRyoo, Byeongjo-
dc.contributor.authorYook, Se-Jin-
dc.date.accessioned2021-08-02T08:52:30Z-
dc.date.available2021-08-02T08:52:30Z-
dc.date.created2021-05-12-
dc.date.issued2020-09-
dc.identifier.issn0924-4247-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/8952-
dc.description.abstractThis study compares the effect of various contamination prevention structure shapes on preventing dust particle deposition on critical sensor surfaces. Sensor surfaces exposed to parallel and vertical airflows were considered as reference cases. A multi-layer plate structure was devised to reduce dust particle deposition on critical sensor surfaces. 1-, 2-, and 3-plate shapes were considered for the multi-layer plate structures. In the results of flow and particle trajectory simulation using ANSYS FLUENT, the 3-plate shape showed superior effects on dust particle deposition prevention. Experiments were conducted to qualitatively validate these simulation results. The two reference types and the multi-layer plate structure types of 1-, 2-, and 3-plates were positioned inside the duct of regular-pentagonal cross-section. After installing a Transmission Electron Microscope (TEM) grid on the critical sensor surface of each shape, an experiment of exposing the sensors to Arizona Test Dust (ISO 12103-1, A4 type) aerosol was performed. Afterwards, the number of sampled dust particles were compared between the respective TEM grids by using a Scanning Electron Microscope (SEM) in order to qualitatively relate the effects of dust particle deposition prevention structures. The numerical approach, validated with experimental results, showed that sensor protection in an environment with dust particle flow can be improved with the use of the 2- or 3-plate structure.-
dc.language영어-
dc.language.isoen-
dc.publisherELSEVIER SCIENCE SA-
dc.titleEffect of a protective shape upstream a sensor on reducing dust particle contamination of critical sensor surface-
dc.typeArticle-
dc.contributor.affiliatedAuthorYook, Se-Jin-
dc.identifier.doi10.1016/j.sna.2020.112126-
dc.identifier.scopusid2-s2.0-85086392882-
dc.identifier.wosid000571664500010-
dc.identifier.bibliographicCitationSENSORS AND ACTUATORS A-PHYSICAL, v.312, pp.1 - 10-
dc.relation.isPartOfSENSORS AND ACTUATORS A-PHYSICAL-
dc.citation.titleSENSORS AND ACTUATORS A-PHYSICAL-
dc.citation.volume312-
dc.citation.startPage1-
dc.citation.endPage10-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaInstruments & Instrumentation-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryInstruments & Instrumentation-
dc.subject.keywordPlusPARTICULATE CONTAMINATION-
dc.subject.keywordPlusDEPOSITION VELOCITY-
dc.subject.keywordPlusSEMICONDUCTOR WAFER-
dc.subject.keywordPlusEUVL MASKS-
dc.subject.keywordPlusMATTER-
dc.subject.keywordPlusDEGRADATION-
dc.subject.keywordPlusBEHAVIOR-
dc.subject.keywordPlusPLASMA-
dc.subject.keywordPlusSPEED-
dc.subject.keywordAuthorParticulate contamination-
dc.subject.keywordAuthorAerosol-
dc.subject.keywordAuthorCritical sensor surface-
dc.subject.keywordAuthorParticle deposition-
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/S0924424720302363?via%3Dihub-
Files in This Item
Go to Link
Appears in
Collections
서울 공과대학 > 서울 기계공학부 > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Yook, Se Jin photo

Yook, Se Jin
COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
Read more

Altmetrics

Total Views & Downloads

BROWSE