Huh, Tae-Hoon; Kang, Byung-Jae; Ra, Geum-Joo; Lee, Kyung-Won; Kim, Steve; Reece, Ronald N.; Rubin, Leonard M.; Ameen, Michael S.; Moon, Won-Min; Lee, Min-Sung, et al.
ArticleIssue Date2008CitationION IMPLANTATION TECHNOLOGY 2008, v.1066, pp.87 - +PublisherAMER INST PHYSICS