Normal-stress Semiconductor Sensor Using a Combined Square-shaped van der Pauw Structure
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Chun-Hyung | - |
dc.contributor.author | Kim, Jonghoek | - |
dc.contributor.author | Sung, Hyuk-Kee | - |
dc.date.available | 2021-03-17T06:54:24Z | - |
dc.date.created | 2021-02-26 | - |
dc.date.issued | 2020-04 | - |
dc.identifier.issn | 1598-1657 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/11763 | - |
dc.description.abstract | A combined square-shaped van der Pauw (VDP) sensor is proposed for calculation of the difference of the in-plane normal-stresses in this work. In previous works, two separate measurements were required, which is so inconvenient and tricky, because the different pair of point-contacts were used for 0 and/or 90 degree oriented resistance measurement. This work analytically presented how to resolve these problems by using a combined VDP configuration and compared the in-plane normal-stresses differential sensitivities for the different silicon planes and the coordinate systems (un-primed or primed). Furthermore, we offered another approach using the voltage difference, in which the sensitivity was observed to be linearly proportional to the unstressed value of voltage V-ref (= I x R). | - |
dc.publisher | IEEK PUBLICATION CENTER | - |
dc.title | Normal-stress Semiconductor Sensor Using a Combined Square-shaped van der Pauw Structure | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Cho, Chun-Hyung | - |
dc.contributor.affiliatedAuthor | Kim, Jonghoek | - |
dc.contributor.affiliatedAuthor | Sung, Hyuk-Kee | - |
dc.identifier.doi | 10.5573/JSTS.2020.20.2.135 | - |
dc.identifier.scopusid | 2-s2.0-85084111721 | - |
dc.identifier.wosid | 000530108200001 | - |
dc.identifier.bibliographicCitation | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.20, no.2, pp.135 - 140 | - |
dc.relation.isPartOf | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE | - |
dc.citation.title | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE | - |
dc.citation.volume | 20 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 135 | - |
dc.citation.endPage | 140 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordAuthor | Semiconductor sensor | - |
dc.subject.keywordAuthor | van der Pauw | - |
dc.subject.keywordAuthor | stress-sensor | - |
dc.subject.keywordAuthor | pressure-senor | - |
dc.subject.keywordAuthor | normal-stress | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
94, Wausan-ro, Mapo-gu, Seoul, 04066, Korea02-320-1314
COPYRIGHT 2020 HONGIK UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.