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Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, D.H. | - |
| dc.contributor.author | Park, S. | - |
| dc.contributor.author | Kwon, O. | - |
| dc.contributor.author | Choi, Y.K. | - |
| dc.contributor.author | Lee, J.S. | - |
| dc.date.accessioned | 2021-12-17T04:41:46Z | - |
| dc.date.available | 2021-12-17T04:41:46Z | - |
| dc.date.created | 2021-12-16 | - |
| dc.date.issued | 2010 | - |
| dc.identifier.issn | 0000-0000 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/21621 | - |
| dc.description.abstract | A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo- mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2and gold thin-film layers. A simplified analytical model has been built to optimize the performance 3f micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code. Copyright © 2009 by ASME. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.title | Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Park, S. | - |
| dc.identifier.doi | 10.1115/MNHMT2009-18038 | - |
| dc.identifier.scopusid | 2-s2.0-77954347471 | - |
| dc.identifier.bibliographicCitation | Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, v.2, pp.373 - 375 | - |
| dc.relation.isPartOf | Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 | - |
| dc.citation.title | Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 | - |
| dc.citation.volume | 2 | - |
| dc.citation.startPage | 373 | - |
| dc.citation.endPage | 375 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.subject.keywordAuthor | Bimorph thermal actuator | - |
| dc.subject.keywordAuthor | MEMS fabrication | - |
| dc.subject.keywordAuthor | Micromirror | - |
| dc.subject.keywordAuthor | Twisting actuation | - |
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