마이크로 거울의 구동을 위한 저전압 비틀림형 열구동기의 설계 및 제작

Abstract

Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2 and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about 11 ° at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over 20 ° at the same applied voltage