대기압 플라즈마 발생용 마이크로 전극 제작 및 저전압 동작 특성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김재혁 | - |
dc.contributor.author | 한성호 | - |
dc.contributor.author | 김영민 | - |
dc.date.accessioned | 2022-01-14T08:44:12Z | - |
dc.date.available | 2022-01-14T08:44:12Z | - |
dc.date.created | 2022-01-14 | - |
dc.date.issued | 2007 | - |
dc.identifier.issn | 1229-2443 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24035 | - |
dc.description.abstract | - A microstructure array has been proposed for micro plasma generation using electroplating and double exposed process. A stable atmospheric plasma has been generated at a low voltage by utilizing the micro electrode gap. Self-aligned microstructure can provide uniform electrode overlap with precisely controlled gap between the electrodes. The proposed structure allows for triode operation, which can expand the generated plasma over a large area by applying a lateral electric field. Electrical characteristics of the micro triode confirm the large numbers of the plasma ions are drifted to the secondary cathode by the lateral electrical field. | - |
dc.publisher | 대한전기학회 | - |
dc.title | 대기압 플라즈마 발생용 마이크로 전극 제작 및 저전압 동작 특성 | - |
dc.title.alternative | Stable Atmospheric Plasma Generation at a Low Voltage using a Microstructure Array | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 김영민 | - |
dc.identifier.bibliographicCitation | 전기학회논문지ABCD, v.56, no.4, pp.773 - 776 | - |
dc.relation.isPartOf | 전기학회논문지ABCD | - |
dc.citation.title | 전기학회논문지ABCD | - |
dc.citation.volume | 56 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 773 | - |
dc.citation.endPage | 776 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART001048694 | - |
dc.description.journalClass | 2 | - |
dc.subject.keywordAuthor | MEMS(멤스) | - |
dc.subject.keywordAuthor | Electroplating(전기도금) | - |
dc.subject.keywordAuthor | Self-aligned(자가정렬) | - |
dc.subject.keywordAuthor | Discharge(방전) | - |
dc.subject.keywordAuthor | Plasma(플라즈마)1. 서 론†교신저자 | - |
dc.subject.keywordAuthor | 正會員 : 弘益大 大學院 電氣情報制御工學科 碩士課程E-mail : jaehyeokkim@gmail.com* 正 會 員 : 三星電子 半導體總括 | - |
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