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A Nickel Micro Switch Operating in a Wide Range of Torsion AnglesA Nickel Micro Switch Operating in a Wide Range of Torsion Angles
- Other Titles
- A Nickel Micro Switch Operating in a Wide Range of Torsion Angles
- Authors
- Seong-Joong Kahng; Jae-Hyeok Kim; Young-Min Kim
- Issue Date
- 2007
- Publisher
- 대한전기학회
- Keywords
- .MEMS; Optical switch; Switching response; Yield strength; .MEMS; Optical switch; Switching response; Yield strength
- Citation
- Journal of Electrical Engineering & Technology, v.2, no.2, pp.263 - 266
- Journal Title
- Journal of Electrical Engineering & Technology
- Volume
- 2
- Number
- 2
- Start Page
- 263
- End Page
- 266
- ISSN
- 1975-0102
- Abstract
- - We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodatethe mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of 200 s (pull-down)/300 s (pull-up) is demonstrated. .
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Related Researcher
- Kim, Young min
- Engineering (Electronic & Electrical Engineering)