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Development of rapid thermal processor for large-glass LTPS production
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Dong Hoon | - |
| dc.contributor.author | Kim, Hyoung-June | - |
| dc.date.accessioned | 2022-01-14T09:44:20Z | - |
| dc.date.available | 2022-01-14T09:44:20Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 2007 | - |
| dc.identifier.issn | 1071-0922 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24310 | - |
| dc.description.abstract | A field-enhanced rapid-thermal-processor (FE-RTP) system that enables LTPS LCD and AMOLED manufacturers to produce poly-Si films at low cost, high throughput, and high yield has been developed. The FE-RTP allows for diverse process options including crystallization, thermal oxidation of gate oxides, and fast pre-compactions. The process and equipment compatibility with a-Si TFT manufacturing lines provides a viable solution to produce poly-Si TFTs using a-Si TFT lines. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | WILEY | - |
| dc.subject | AIDED LATERAL CRYSTALLIZATION | - |
| dc.subject | SILICON THIN-FILM | - |
| dc.subject | FIELD | - |
| dc.subject | SI | - |
| dc.title | Development of rapid thermal processor for large-glass LTPS production | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Kim, Hyoung-June | - |
| dc.identifier.doi | 10.1889/1.2739798 | - |
| dc.identifier.scopusid | 2-s2.0-54149100915 | - |
| dc.identifier.wosid | 000245635900005 | - |
| dc.identifier.bibliographicCitation | JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, v.15, no.5, pp.293 - 296 | - |
| dc.relation.isPartOf | JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY | - |
| dc.citation.title | JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY | - |
| dc.citation.volume | 15 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | 293 | - |
| dc.citation.endPage | 296 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Optics | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Optics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.subject.keywordPlus | AIDED LATERAL CRYSTALLIZATION | - |
| dc.subject.keywordPlus | SILICON THIN-FILM | - |
| dc.subject.keywordPlus | FIELD | - |
| dc.subject.keywordPlus | SI | - |
| dc.subject.keywordAuthor | field-enhanced RTP | - |
| dc.subject.keywordAuthor | active-matrix organic light-emitting diode | - |
| dc.subject.keywordAuthor | low-temperature poly-crystalline-silicon LCD | - |
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