고성능 주사탐침열현미경 열전탐침 제작
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김동립 | - |
dc.contributor.author | 권오명 | - |
dc.contributor.author | 박승호 | - |
dc.contributor.author | 최영기 | - |
dc.contributor.author | 이준식 | - |
dc.contributor.author | 김경태 | - |
dc.date.accessioned | 2022-02-17T04:43:10Z | - |
dc.date.available | 2022-02-17T04:43:10Z | - |
dc.date.created | 2022-02-17 | - |
dc.date.issued | 2005 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/25399 | - |
dc.description.abstract | Scanning Thermal Microscope (SThM) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available SThM probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 nm. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 nm and the distance of the junction from the very end of the tip is 150 nm. The probe is currently being used for nanoscale thermal probing of nano-material and nano device. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 대한기계학회 | - |
dc.title | 고성능 주사탐침열현미경 열전탐침 제작 | - |
dc.title.alternative | High Performance Thermoelectric Scanning Thermal Microscopy Probe Fabrication | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 박승호 | - |
dc.identifier.bibliographicCitation | 대한기계학회논문집 A, v.29, no.11, pp.1503 - 1508 | - |
dc.relation.isPartOf | 대한기계학회논문집 A | - |
dc.citation.title | 대한기계학회논문집 A | - |
dc.citation.volume | 29 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 1503 | - |
dc.citation.endPage | 1508 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART000953532 | - |
dc.description.journalClass | 2 | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | 주사탐침열현미경 | - |
dc.subject.keywordAuthor | 열저항 탐침 | - |
dc.subject.keywordAuthor | 열전 탐침 | - |
dc.subject.keywordAuthor | Thermal probe | - |
dc.subject.keywordAuthor | Scanning Thermal Mmicroscopye: SThM | - |
dc.subject.keywordAuthor | Thermo-resistive Probe | - |
dc.subject.keywordAuthor | Thermoelectric Probe | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
94, Wausan-ro, Mapo-gu, Seoul, 04066, Korea02-320-1314
COPYRIGHT 2020 HONGIK UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.