고성능 주사탐침열현미경 열전탐침 제작

Abstract

Scanning Thermal Microscope (SThM) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available SThM probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 nm. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 nm and the distance of the junction from the very end of the tip is 150 nm. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.