Surface-discharge characteristics of magnesium oxide thin films prepared by ion beam-assisted deposition
- Authors
- Yu, ZN; Seo, JW; Yu, SJ; Zheng, DX; Sun, J
- Issue Date
- 1-Jan-2003
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- MgO films; ion beam-assisted deposition; plasma display panel
- Citation
- SURFACE & COATINGS TECHNOLOGY, v.162, no.1, pp.11 - 18
- Journal Title
- SURFACE & COATINGS TECHNOLOGY
- Volume
- 162
- Number
- 1
- Start Page
- 11
- End Page
- 18
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/26012
- DOI
- 10.1016/S0257-8972(02)00580-7
- ISSN
- 0257-8972
- Abstract
- To improve the lifetime of AC plasma display panels (PDPs), the surface glow discharge characteristics of MgO films prepared by ion beam-assisted deposition have been investigated. With MgO films prepared by evaporation of MgO and simultaneous argon ion bombardment with energy of approximately 300 eV and oxygen introduction at a partial pressure of approximately 0.2 mTorr, the discharge voltage values are comparable with those of e-beam evaporated MgO films. Moreover, the sample prepared shows more sputter-resistant properties than samples prepared by the electron-beam method. It is believed that the ion beam-assisted method is appropriate to deposit MgO film for a protective layer for AC PDPs. (C) 2002 Elsevier Science B.V. All rights reserved.
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Collections - College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
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