마이크로 표면돌기의 응착력과 마찰력Adhesion and Friction Forces of Micro Surface Bumps
- Other Titles
- Adhesion and Friction Forces of Micro Surface Bumps
- Authors
- 조성산; 박승호; 이승섭; 임제성
- Issue Date
- 2004
- Publisher
- 대한기계학회
- Keywords
- Hemispherical Bump; Torus Bump; Adhesion; Friction; MEMS; 반구형 돌기; 환상고리형 돌기; 응착; 마찰; 미세전자기계시스템; Hemispherical Bump; Torus Bump; Adhesion; Friction; MEMS
- Citation
- 대한기계학회논문집 A, v.28, no.8, pp.1087 - 1092
- Journal Title
- 대한기계학회논문집 A
- Volume
- 28
- Number
- 8
- Start Page
- 1087
- End Page
- 1092
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/26287
- ISSN
- 1226-4873
- Abstract
- Adhesion and friction forces influence adversely on performance and durability of MEMS. It has been reported that the adhesion and friction forces can be reduced with the introduction of micro surface bumps into the contacting interfaces. In this study experiments were conducted to investigate comparatively the effect of hemispherical and torus micro bumps on the adhesion and friction forces. It is confirmed that micro bumps reduce the adhesion and friction forces, and their effect is more pronounced with the bumps of smaller outer boundary radius. Moreover, the results shows that the torus bumps exhibit more rapid decrease of the adhesion and friction forces with the decrease in the outer boundary radius of bump than the hemispherical bumps. When the magnitude of adhesion force is same, the torus bumps generate smaller friction force than the hemispherical bumps. The usage of hemispherical and torus bumps to reduce the adhesion and friction forces in MEMS is discussed.
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Collections - College of Engineering > Department of Mechanical and System Design Engineering > 1. Journal Articles
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