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Fabrication of RF inductor using patterned FeTaN soft magnetic films
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Bae, S. | - |
| dc.contributor.author | Shin, D.-H. | - |
| dc.contributor.author | Kim, C.-S. | - |
| dc.contributor.author | Ryu, S.-R. | - |
| dc.contributor.author | Nam, S.-E. | - |
| dc.contributor.author | Song, J.-S. | - |
| dc.contributor.author | Yamaguchi, M. | - |
| dc.contributor.author | Kim, H.-J. | - |
| dc.date.accessioned | 2022-04-11T03:41:45Z | - |
| dc.date.available | 2022-04-11T03:41:45Z | - |
| dc.date.created | 2022-04-11 | - |
| dc.date.issued | 2002 | - |
| dc.identifier.issn | 0074-6843 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/27146 | - |
| dc.description.abstract | The fabrication of radio frequency (RF) inductor was discussed using patterned FeTaN soft magnetic films. FeTaN nanocrystalline films as a part of magnetic layer showed good soft magnetic properties as well as high magnetization saturation. The RF inductor combine patterned FeTaN film was fabricated. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.title | Fabrication of RF inductor using patterned FeTaN soft magnetic films | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Kim, H.-J. | - |
| dc.identifier.scopusid | 2-s2.0-18244431360 | - |
| dc.identifier.bibliographicCitation | Digests of the Intermag Conference | - |
| dc.relation.isPartOf | Digests of the Intermag Conference | - |
| dc.citation.title | Digests of the Intermag Conference | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scopus | - |
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