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Preparation of Pt/SrBi2Ta2O9/TiO2/Si structures for metal-ferroelectric-insulator-semiconductor field-effect-transistors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, JD | - |
| dc.contributor.author | Oh, TS | - |
| dc.date.accessioned | 2022-04-14T05:40:44Z | - |
| dc.date.available | 2022-04-14T05:40:44Z | - |
| dc.date.created | 2022-04-14 | - |
| dc.date.issued | 2000-12 | - |
| dc.identifier.issn | 0374-4884 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/27324 | - |
| dc.description.abstract | The Pt/SBT/TiO2 /Si structure has been proposed for metal-ferroelectric-insulator-semi-conductor field-effect-transistor (MFIS-FET) applications. Liquid source misted chemical deposition was used to deposit a SrBi2.4Ta2O9 (SBT) thin film on a Si(100) substrate with a TiO2 buffer layer deposited by DC reactive sputtering. The capacitance of the Pt/SBT/TiO2/Si structure in the accumulation region became larger with increasing oxygen content in the sputtering gas used for the TiO2 deposition. The Pt/SBT/TiO2/Si structure exhibited a C-V hysteresis loop with a memory window of 1 V and could be applied for MFIS-FET applications. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | KOREAN PHYSICAL SOC | - |
| dc.subject | THIN-FILMS | - |
| dc.subject | RF MAGNETRON | - |
| dc.subject | MEMORY | - |
| dc.subject | MFIS | - |
| dc.title | Preparation of Pt/SrBi2Ta2O9/TiO2/Si structures for metal-ferroelectric-insulator-semiconductor field-effect-transistors | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Oh, TS | - |
| dc.identifier.wosid | 000165908600058 | - |
| dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.37, no.6, pp.1072 - 1076 | - |
| dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.citation.volume | 37 | - |
| dc.citation.number | 6 | - |
| dc.citation.startPage | 1072 | - |
| dc.citation.endPage | 1076 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
| dc.subject.keywordPlus | THIN-FILMS | - |
| dc.subject.keywordPlus | RF MAGNETRON | - |
| dc.subject.keywordPlus | MEMORY | - |
| dc.subject.keywordPlus | MFIS | - |
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