SOI 슬롯 광 도파로 기반 단일 및 삽입-분기 채널 링-공진형 바이오·케미컬집적광학 센서의 제원에 대한 감도 해석

Abstract

The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add–drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add–drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 µm and coupling gap of 0.5 µm were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.