Fabrication of thin film inductors using FeTaN soft magnetic films
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, CH | - |
dc.contributor.author | Shin, DH | - |
dc.contributor.author | Ahn, DH | - |
dc.contributor.author | Nam, SE | - |
dc.contributor.author | Kim, HJ | - |
dc.date.accessioned | 2022-05-18T06:41:09Z | - |
dc.date.available | 2022-05-18T06:41:09Z | - |
dc.date.created | 2022-05-18 | - |
dc.date.issued | 1999-04-15 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/27602 | - |
dc.description.abstract | Planar-type thin film inductors were fabricated using FeTaN soft magnetic films. It was found that excellent soft magnetic properties (coercivity of 0.1-0.2 Oe, effective permeability of 4000, and saturation magnetization of 15 kG) could be obtained in the Fe78.8Ta8.5N12.7 films after anneals at 400-500 degrees C. The initial permeability of the films was constant up to 20 MHz. Internal-coil inductors, in which Cu coils were sandwiched by SiO2 insulator/FeTaN magnetic layers, were fabricated and their characteristics were compared with air-core inductors. The inductance was increased by a factor of 4 compared to air-core inductors. However, the high frequency characteristic was degraded due to a frequency-limited permeability of FeTaN magnetic layers. (C) 1999 American Institute of Physics. [S0021-8979(99)61508-0]. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Fabrication of thin film inductors using FeTaN soft magnetic films | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Nam, SE | - |
dc.contributor.affiliatedAuthor | Kim, HJ | - |
dc.identifier.doi | 10.1063/1.369135 | - |
dc.identifier.wosid | 000079850700207 | - |
dc.identifier.bibliographicCitation | JOURNAL OF APPLIED PHYSICS, v.85, no.8, pp.4898 - 4900 | - |
dc.relation.isPartOf | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.title | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 85 | - |
dc.citation.number | 8 | - |
dc.citation.startPage | 4898 | - |
dc.citation.endPage | 4900 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
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