Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
DESIGN AND FABRICATION OF LOW-VOLTAGE TWISTING-TYPE THERMAL ACTUATORS FOR MICROMIRRORS
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Dong Hyun | - |
| dc.contributor.author | Park, Seungho | - |
| dc.contributor.author | Kwon, Ohmyoung | - |
| dc.contributor.author | Choi, Young Ki | - |
| dc.contributor.author | Lee, Joon Sik | - |
| dc.date.accessioned | 2022-06-29T07:41:04Z | - |
| dc.date.available | 2022-06-29T07:41:04Z | - |
| dc.date.created | 2022-06-29 | - |
| dc.date.issued | 2010 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/29717 | - |
| dc.description.abstract | A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO(2) and gold thin-film layers. A simplified analytical model has been built to optimize the performance of micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | AMER SOC MECHANICAL ENGINEERS | - |
| dc.title | DESIGN AND FABRICATION OF LOW-VOLTAGE TWISTING-TYPE THERMAL ACTUATORS FOR MICROMIRRORS | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Park, Seungho | - |
| dc.contributor.affiliatedAuthor | Kwon, Ohmyoung | - |
| dc.identifier.wosid | 000282724400052 | - |
| dc.identifier.bibliographicCitation | MNHMT2009, VOL 2, pp.373 - 375 | - |
| dc.relation.isPartOf | MNHMT2009, VOL 2 | - |
| dc.citation.title | MNHMT2009, VOL 2 | - |
| dc.citation.startPage | 373 | - |
| dc.citation.endPage | 375 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Proceedings Paper | - |
| dc.description.journalClass | 3 | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Mechanical | - |
| dc.subject.keywordAuthor | Micromirror | - |
| dc.subject.keywordAuthor | Bimorph Thermal Actuator | - |
| dc.subject.keywordAuthor | Twisting actuation | - |
| dc.subject.keywordAuthor | MEMS Fabrication | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.