A MICROFABRICATED COLUMN COMPRISED OF HIGH-ASPECT-RATIO SILICON PILLAR ARRAYS FOR MICRO-GAS CHROMATOGRAPHY
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Seong, Dong Wook | - |
dc.contributor.author | Bae, Sung Kuk | - |
dc.contributor.author | Seo, Jung Hwan | - |
dc.date.accessioned | 2024-04-16T05:00:26Z | - |
dc.date.available | 2024-04-16T05:00:26Z | - |
dc.date.issued | 2024 | - |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/32980 | - |
dc.description.abstract | This study introduces the fabrication and application of a micro-pillar array using MEMS processes to improve the performance of a crucial component, the separation column, within mu-GC systems. These micro-pillars, measuring approximately 2 mu m in diameter and 130 mu m in height, were densely packed at a density of around 9000 rods/mm(2) onto the separation column. The substitution of the conventional rectangular-shaped column with pillar arrays resulted in an approximate 40% increase in resolution under identical pressure and oven temperature conditions (0.969psi, 40 degrees C). These findings mark a significant advancement in mu-GC technology, potentially enabling chip size reduction, reduced power consumption, and minimized packaging volume. | - |
dc.format.extent | 4 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | IEEE | - |
dc.title | A MICROFABRICATED COLUMN COMPRISED OF HIGH-ASPECT-RATIO SILICON PILLAR ARRAYS FOR MICRO-GAS CHROMATOGRAPHY | - |
dc.type | Article | - |
dc.publisher.location | 미국 | - |
dc.identifier.doi | 10.1109/MEMS58180.2024.10439537 | - |
dc.identifier.scopusid | 2-s2.0-85186642908 | - |
dc.identifier.wosid | 001174201100223 | - |
dc.identifier.bibliographicCitation | 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, pp 867 - 870 | - |
dc.citation.title | 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | - |
dc.citation.startPage | 867 | - |
dc.citation.endPage | 870 | - |
dc.type.docType | Proceedings Paper | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Engineering, Mechanical | - |
dc.subject.keywordAuthor | Silicon Pillar | - |
dc.subject.keywordAuthor | Micro-Gas Chromatography (mu-GC) | - |
dc.subject.keywordAuthor | Micro-Separation Column | - |
dc.subject.keywordAuthor | Volatile Organic Compounds (VOCs) | - |
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