Joule-heating Induced Crystallization (JIC) of Amorphous Silicon Films
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 고다영 | - |
dc.contributor.author | 노재상 | - |
dc.date.available | 2020-07-10T04:32:07Z | - |
dc.date.created | 2020-07-06 | - |
dc.date.issued | 2018 | - |
dc.identifier.issn | 1226-9360 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/4207 | - |
dc.description.abstract | An electric field was applied to a Mo conductive layer in the sandwiched structure of glass/SiO2/Mo/SiO2/ a-Si to induce Joule heating in order to generate the intense heat needed to carry out the crystallization of amorphous silicon. Polycrystalline silicon was produced via Joule heating through a solid state transformation. Blanket crystallization was accomplished within the range of millisecond, thus demonstrating the possibility of a new crystallization route for amorphous silicon films. The grain size of JIC poly-Si can be varied from few tens of nanometers to the one having the larger grain size exceeding that of excimer laser crystallized (ELC) poly-Si according to transmission electron microscopy. We report here the blanket crystallization of amorphous silicon films using the 2nd generation glass substrate. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | 한국마이크로전자및패키징학회 | - |
dc.title | Joule-heating Induced Crystallization (JIC) of Amorphous Silicon Films | - |
dc.title.alternative | Joule-heating Induced Crystallization (JIC) of Amorphous Silicon Films | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 노재상 | - |
dc.identifier.bibliographicCitation | 마이크로전자 및 패키징학회지, v.25, no.4, pp.101 - 104 | - |
dc.relation.isPartOf | 마이크로전자 및 패키징학회지 | - |
dc.citation.title | 마이크로전자 및 패키징학회지 | - |
dc.citation.volume | 25 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 101 | - |
dc.citation.endPage | 104 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART002427284 | - |
dc.description.journalClass | 2 | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | Crystallization | - |
dc.subject.keywordAuthor | Thin Film Transistor | - |
dc.subject.keywordAuthor | Poly-Si | - |
dc.subject.keywordAuthor | Joule-heating | - |
dc.subject.keywordAuthor | AMOLED | - |
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