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Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring
Ji, CH;
Kim, YK
; Chung, GB
Article
Issue Date
2000
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.39, no.12B, pp.7138 - 7141
Publisher
INST PURE APPLIED PHYSICS
1
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Author
Kim, Young Kwan
1
Subject
bulk micromachining
1
DRIE
1
electromagnetic micromirror
1
MOEMS
1
parylene C
1
PRESSURE SENSORS
1
surface micromachining
1
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Article
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English
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