Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
반도체 wafer 제조공정용 Hard Mask PR Strip 검사 시스템 개발
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jong Hwan | - |
| dc.date.available | 2021-02-26T05:42:33Z | - |
| dc.date.created | 2021-02-19 | - |
| dc.date.issued | 2020-10-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/18753 | - |
| dc.publisher | 한국산업경영시스템학회 | - |
| dc.title | 반도체 wafer 제조공정용 Hard Mask PR Strip 검사 시스템 개발 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Lee, Jong Hwan | - |
| dc.identifier.bibliographicCitation | 2020년 한국산업경영시스템학회 춘추계 통합학술대회, v.1, no.1, pp.16 | - |
| dc.relation.isPartOf | 2020년 한국산업경영시스템학회 춘추계 통합학술대회 | - |
| dc.relation.isPartOf | 2020년 한국산업경영시스템학회 춘추계 통합학술대회 논문집 | - |
| dc.citation.title | 2020년 한국산업경영시스템학회 춘추계 통합학술대회 | - |
| dc.citation.volume | 1 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 16 | - |
| dc.citation.endPage | 16 | - |
| dc.citation.conferencePlace | 서울 소공동 롯데호텔 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - School of Industrial Engineering > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Lee, Jonghwan
- College of Engineering (Department of Industrial Engineering)