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a-Si 박막형 태양전지의 잔류응력 해석에 관한 연구
허장욱
; 김동욱; 최성대
Article
Issue Date
2013
Citation
한국기계가공학회지, v.12, no.2, pp.14 - 19
Publisher
한국기계가공학회
Automated Wafer Separation from the Stacked Array of Solar Cell Silicon Wafers Using Continuous Water Jet
곽호상; 김경진; 김동주
Article
Issue Date
2010
Citation
반도체디스플레이기술학회지, v.9, no.2, pp 21 - 25
Publisher
한국반도체디스플레이기술학회
1
Discover
Author
Hur, Jang Wook
1
곽호상
1
김경진
1
김동욱
1
김동주
1
최성대
1
Subject
a-Si
1
Coefficient of Thermal Expansion
1
Dissimilar Materials
1
Residual Stress
1
Silicon Wafer
1
Thin Film
1
Wafer Separation
1
Water Jet
1
박막
1
비결정질 실리콘
1
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반도체디스플레이기술학회지
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한국기계가공학회지
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