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실리콘 웨이퍼 연마장비용 왁스 스핀코팅장치의 내부기류 제어에 관한 전산유동해석
김경진; 김동주; 박중윤
Article
Issue Date
2011
Citation
반도체디스플레이기술학회지, v.10, no.1, pp 1 - 6
Publisher
한국반도체디스플레이기술학회
1
Discover
Author
김경진
1
Subject
Air Flow Control
1
CFD
1
Silicon Wafer
1
Spin Coater
1
Wafer Polishing Station
1
Date Issued
2011
1
Type
Article
1
Language
KOR
1
Journal
반도체디스플레이기술학회지
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