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반도체 공정장비용 알루미나 기반 내플라즈마 세라믹스 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이현권 | - |
| dc.date.accessioned | 2022-03-25T05:40:43Z | - |
| dc.date.available | 2022-03-25T05:40:43Z | - |
| dc.date.created | 2022-03-25 | - |
| dc.date.issued | 2020-11-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/20503 | - |
| dc.publisher | 한국세라믹학회 | - |
| dc.title | 반도체 공정장비용 알루미나 기반 내플라즈마 세라믹스 개발 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 이현권 | - |
| dc.identifier.bibliographicCitation | 2020 한국세라믹학회 추계학술대회 | - |
| dc.relation.isPartOf | 2020 한국세라믹학회 추계학술대회 | - |
| dc.citation.title | 2020 한국세라믹학회 추계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 대전컨벤션센터 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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