비정질 IZO 애노드 박막을 이용한 유기물 플렉서블 디스플레이의상온 제작

Abstract

We report on the fabrication of organic-based flexible displays using an amorphous IZO anode grown at room temperature. The IZO anode films were grown by a conventional DC reactive sputtering on the polycarbonate (PC) substrate at room temperature using a synthesized IZO target in a Ar/O2 ambient. Both x-ray diffraction (XRD) and high resolution electron microscope (HREM) examination results show that the IZO anode film grown at room temperature is complete amorphous structure due to low substrate temperature. A sheet resistance of 35.6 Ω/□, average transmittance above 90 % in visible range, and root mean spare roughness of 6～10.5 Å were obtained even in the IZO anode film grown on PC substrate at room temperature. It is shown that the Ir(ppy)3 doped flexible organic light emitting diode (OLED) fabricated on the IZO anode exhibit comparable current-voltage-luminance characteristics as well as external quantum efficiency and power efficiency to OLED fabricated on conventional ITO/Glass substrate. These findings indicate that the IZO anode film grown on PC substrate is a promising anode materials for the fabrication of organic based flexible displays.