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스퍼터링 및 전기도금법으로 증착된 Cu 박막의 두께에 따른 어닝링 집합조직
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이상훈 | - |
| dc.contributor.author | 박노진 | - |
| dc.date.accessioned | 2023-12-11T11:30:37Z | - |
| dc.date.available | 2023-12-11T11:30:37Z | - |
| dc.date.issued | 2006 | - |
| dc.identifier.issn | 1738-8228 | - |
| dc.identifier.issn | 2288-8241 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/22833 | - |
| dc.format.extent | 6 | - |
| dc.publisher | 대한금속·재료학회 | - |
| dc.title | 스퍼터링 및 전기도금법으로 증착된 Cu 박막의 두께에 따른 어닝링 집합조직 | - |
| dc.title.alternative | Texture Evolution According to the Film Thickness of Annealed Cu Films Depositedby Sputtering and Electro-deposition | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.bibliographicCitation | 대한금속·재료학회지, v.44, no.8, pp 556 - 561 | - |
| dc.citation.title | 대한금속·재료학회지 | - |
| dc.citation.volume | 44 | - |
| dc.citation.number | 8 | - |
| dc.citation.startPage | 556 | - |
| dc.citation.endPage | 561 | - |
| dc.identifier.kciid | ART001020971 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | kci | - |
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