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화학기상증착법에 의한 탄소나노튜브의 성장에 미치는 암모니아 가스의 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이동구 | - |
| dc.date.accessioned | 2023-12-11T12:00:32Z | - |
| dc.date.available | 2023-12-11T12:00:32Z | - |
| dc.date.issued | 2010 | - |
| dc.identifier.issn | 1226-7945 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/23031 | - |
| dc.description.abstract | Carbon nanotubes (CNTs) were synthesized by Fe-catalytic chemical vapor deposition (CVD) method about 800oC. The influence of process parameters such as pretreatment conditions, gas flow ratio, processing time, etc on the growth of CNTs was investigated by field emission scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. Ammonia was added to acetylene source gas before and during the CNT growth. Different types of CNTs formed depending upon the processing condition. It was found that ammonia prevented amorphous carbons from adsorbing to the outer wall of CNT, resulting in purification of CNTs during CNT growth. | - |
| dc.format.extent | 6 | - |
| dc.language | 한국어 | - |
| dc.language.iso | KOR | - |
| dc.publisher | 한국전기전자재료학회 | - |
| dc.title | 화학기상증착법에 의한 탄소나노튜브의 성장에 미치는 암모니아 가스의 영향 | - |
| dc.title.alternative | Effect of Ammonia Gas on Growth of Chemically Vapor-Deposited Carbon Nanotubes | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.bibliographicCitation | 전기전자재료학회논문지, v.23, no.5, pp 418 - 423 | - |
| dc.citation.title | 전기전자재료학회논문지 | - |
| dc.citation.volume | 23 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | 418 | - |
| dc.citation.endPage | 423 | - |
| dc.identifier.kciid | ART001443341 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.subject.keywordAuthor | Ammonia | - |
| dc.subject.keywordAuthor | Carbon nanotube | - |
| dc.subject.keywordAuthor | Catalytic CVD | - |
| dc.subject.keywordAuthor | Fe catalyst | - |
| dc.subject.keywordAuthor | Ammonia | - |
| dc.subject.keywordAuthor | Carbon nanotube | - |
| dc.subject.keywordAuthor | Catalytic CVD | - |
| dc.subject.keywordAuthor | Fe catalyst | - |
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