Automated Wafer Separation from the Stacked Array of Solar Cell Silicon Wafers Using Continuous Water Jet
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 곽호상 | - |
dc.contributor.author | 김경진 | - |
dc.contributor.author | 김동주 | - |
dc.date.accessioned | 2023-12-11T12:00:32Z | - |
dc.date.available | 2023-12-11T12:00:32Z | - |
dc.date.issued | 2010 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/23033 | - |
dc.description.abstract | In response to the industrial needs for automated handling of very thin solar cell wafers, this paper presents the design concept for the individual wafer separation from the stacked wafers by utilizing continuous water jet. The experimental apparatus for automated wafer separation was constructed and it includes the water jet system and the microprocessor controlled wafer stack advancing system. Through a series of tests, the performance of the proposed design is quantified into the success rate of single wafer separation and the rapidity of processing wafer stack. Also, the inclination angle of wafer equipped cartridge and the water jet flowrate are found to be important parameters to be considered for process optimization. The proposed design shows the concept for fast and efficient processing of wafer separation and can be implemented in the automated manufacturing of silicon based solar cell wafers. | - |
dc.format.extent | 5 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.title | Automated Wafer Separation from the Stacked Array of Solar Cell Silicon Wafers Using Continuous Water Jet | - |
dc.title.alternative | Automated Wafer Separation from the Stacked Array of Solar Cell Silicon Wafers Using Continuous Water Jet | - |
dc.type | Article | - |
dc.publisher.location | 대한민국 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.9, no.2, pp 21 - 25 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 9 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 21 | - |
dc.citation.endPage | 25 | - |
dc.identifier.kciid | ART001462081 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | Silicon Wafer | - |
dc.subject.keywordAuthor | Solar Cell | - |
dc.subject.keywordAuthor | Wafer Separation | - |
dc.subject.keywordAuthor | Water Jet | - |
dc.subject.keywordAuthor | Silicon Wafer | - |
dc.subject.keywordAuthor | Solar Cell | - |
dc.subject.keywordAuthor | Wafer Separation | - |
dc.subject.keywordAuthor | Water Jet | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
350-27, Gumi-daero, Gumi-si, Gyeongsangbuk-do, Republic of Korea (39253)054-478-7170
COPYRIGHT 2020 Kumoh University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.