PSD의 출력특성향상을 위한 경사 입력광의 특성해석에 대한 기본연구

Abstract

In this paper, the output characteristics of PSD(Position Sensetive Detector) used in measurement system are described. Most of the precision measurment systems are accomplished by a laser diode(LD), a photo diode(PD) and PSD(Position Sensetive Detector), which are used in reflection of mirror or projection of infrared spectrometer. But it is especially restricted by resolution of PD and PSD in nano-measurement. A new inclined light methods into the PSD are employed in the surface measurement system for increasing the resolution. As the results, we can know that the output characteristics of detective senser (PSD) become more than 2 or 3 times by changing inclined angle(range: 5 degree) compared with common angle. In addition, the experiment results are confirmed that the change of inclined angle is not affecting to the linearity and repeating.