위치결정 스테이지 베이스 진동 모델링 및 저감기법 개발Modeling and Countermeasure for Positioning Stage Base Vibration
- Other Titles
- Modeling and Countermeasure for Positioning Stage Base Vibration
- Authors
- 박아영; 임재곤; 홍성욱
- Issue Date
- 2010
- Publisher
- 한국생산제조학회
- Keywords
- Base Structure Vibration(베이스 구조 진동); Positioning Stage(위치결정 스테이지); Dynamic Model(동적 모델); Input Shaping(입력성형); Residual Vibration(잔류진동)
- Citation
- 한국생산제조학회지, v.19, no.4, pp 476 - 484
- Pages
- 9
- Journal Title
- 한국생산제조학회지
- Volume
- 19
- Number
- 4
- Start Page
- 476
- End Page
- 484
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/23050
- ISSN
- 2508-5093
2508-5107
- Abstract
- Precise positioning stages are often employed for precise machinery. For the purpose of vibration isolation, these precise positioning stages are mounted on a heavy base structure which is supported by compliant springs. Then the base structure is subjected to residual vibration due to the reactive force and vertical moving load induced by the stage motion. This paper investigates the vibration behavior of a positioning stage base and the associated vibration suppression technique. A dynamic model is developed to investigate the base vibration due to the reactive force and moving load effects by the moving stage. An input shaping technique is also developed to suppress the residual vibrations in base structures. Simulations and experiments show that the developed dynamic model adequately represents the base vibration and that the proposed input shaping technique effectively removes the residual vibrations from the positioning stage base.
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