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2축 이송계 정밀도 측정을 위한 레이저 간섭계 4축 자동정렬장치 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong, Seong-Wook | - |
| dc.date.accessioned | 2023-12-11T15:30:25Z | - |
| dc.date.available | 2023-12-11T15:30:25Z | - |
| dc.date.issued | 2000-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/24376 | - |
| dc.publisher | 한국정밀공학회지 | - |
| dc.title | 2축 이송계 정밀도 측정을 위한 레이저 간섭계 4축 자동정렬장치 개발 | - |
| dc.type | Article | - |
| dc.identifier.bibliographicCitation | 한국정밀공학회지, v.17, no.9(114) | - |
| dc.citation.title | 한국정밀공학회지 | - |
| dc.citation.volume | 17 | - |
| dc.citation.number | 9(114) | - |
| dc.description.isOpenAccess | N | - |
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