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Texture Evolution in TiN, TaN and W₂N Thin Films
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, In-Soo | - |
| dc.date.accessioned | 2023-12-11T15:30:26Z | - |
| dc.date.available | 2023-12-11T15:30:26Z | - |
| dc.date.issued | 2002-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/24442 | - |
| dc.format.extent | 6 | - |
| dc.publisher | Trans Tech Publications, Switzerland | - |
| dc.title | Texture Evolution in TiN, TaN and W₂N Thin Films | - |
| dc.title.alternative | Texture Evolution in TiN, TaN and W₂N Thin Films | - |
| dc.type | Article | - |
| dc.identifier.bibliographicCitation | Materials Science Forum, v.408-412, pp 1591 - 1596 | - |
| dc.citation.title | Materials Science Forum | - |
| dc.citation.volume | 408-412 | - |
| dc.citation.startPage | 1591 | - |
| dc.citation.endPage | 1596 | - |
| dc.description.isOpenAccess | N | - |
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