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Polymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithography
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 채석 | - |
| dc.date.accessioned | 2023-12-11T17:00:26Z | - |
| dc.date.available | 2023-12-11T17:00:26Z | - |
| dc.date.issued | 2013-12 | - |
| dc.identifier.issn | 0167-9317 | - |
| dc.identifier.issn | 1873-5568 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/25104 | - |
| dc.format.extent | 5 | - |
| dc.publisher | Elsevier B. V. | - |
| dc.title | Polymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithography | - |
| dc.title.alternative | Polymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithography | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.bibliographicCitation | Microelectronic Engineering, v.117, no.0, pp 67 - 71 | - |
| dc.citation.title | Microelectronic Engineering | - |
| dc.citation.volume | 117 | - |
| dc.citation.number | 0 | - |
| dc.citation.startPage | 67 | - |
| dc.citation.endPage | 71 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | sci | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
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