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Texture Evolution in the Sputtered and Electro-deposited Cu Thin Films Using EBSD Method
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박노진 | - |
| dc.date.accessioned | 2023-12-11T17:00:27Z | - |
| dc.date.available | 2023-12-11T17:00:27Z | - |
| dc.date.issued | 2007-01 | - |
| dc.identifier.issn | 1662-9779 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/25139 | - |
| dc.format.extent | 4 | - |
| dc.publisher | Scientific.net | - |
| dc.title | Texture Evolution in the Sputtered and Electro-deposited Cu Thin Films Using EBSD Method | - |
| dc.title.alternative | Texture Evolution in the Sputtered and Electro-deposited Cu Thin Films Using EBSD Method | - |
| dc.type | Article | - |
| dc.publisher.location | 스위스 | - |
| dc.identifier.bibliographicCitation | Solid State Phenomena, v.124-126, pp 215 - 218 | - |
| dc.citation.title | Solid State Phenomena | - |
| dc.citation.volume | 124-126 | - |
| dc.citation.startPage | 215 | - |
| dc.citation.endPage | 218 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
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