제조 공정별 대형 알루미나 세라믹스의 전기적 특성Electrical Properties of Large Alumina Ceramics Prepared by Various Processing
- Other Titles
- Electrical Properties of Large Alumina Ceramics Prepared by Various Processing
- Authors
- 조경식; 이현권; 박용일; 김미영
- Issue Date
- 2012
- Publisher
- 한국세라믹학회
- Keywords
- Alumina; Dielectric constant; Dielectric loss; Dielectric strength; Volume resistance
- Citation
- 한국세라믹학회지, v.49, no.2, pp.179 - 184
- Journal Title
- 한국세라믹학회지
- Volume
- 49
- Number
- 2
- Start Page
- 179
- End Page
- 184
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/2682
- ISSN
- 1229-7801
- Abstract
- The size of various alumina ceramics used in semiconductor and display industry is required to increase with increase in wafer and panel size. In this research, large alumina ceramics were fabricated by uniaxial pressing, cold isostatic pressing and filter pressing with commercial powder and thereafter sintering at 1600oC in gas furnace. The large alumina ceramics exhibited dense microstructure corresponding to 98.5% of theoretical density and 99.8% of high purity. The impurities and microstructural defects of the alumina were found to influence the resistance and dielectric properties. The volume resistances in these four aluminas were almost the same while the pure alumina was higher value. The dielectric constant, dielectric loss and dielectric strength of aluminas were placed within the range of 10.3~11.5, 0.018~0.036, and 10.1~12.4 kV/mm, respectively.
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