반도체 Wafer용 Grinder의 안정화 설계
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 길사근 | - |
dc.contributor.author | 노승훈 | - |
dc.contributor.author | 신윤호 | - |
dc.contributor.author | 김영조 | - |
dc.contributor.author | 김건형 | - |
dc.date.accessioned | 2024-02-27T15:30:43Z | - |
dc.date.available | 2024-02-27T15:30:43Z | - |
dc.date.issued | 2017-01 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/27664 | - |
dc.description.abstract | One of the most critical aspects of the modern semiconductor industry is the quality of wafer surface, the roughness of which is mostly caused by the ingot slicing. And the grinding is supposed to be the main process to reduce the surface roughness. The vibrations of the disc surface grinder are the major problem to effectively achieve the required surface quality. In this study, the structure of a disc surface grinder was analyzed through the experiment and the computer simulation to investigate the dynamic characteristics of the machine, and further to alter the design for the improved stability. The result of the study shows that simple design alterations without alternating main body can effectively suppress the vibrations of the machine. | - |
dc.format.extent | 6 | - |
dc.language | 한국어 | - |
dc.language.iso | KOR | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.title | 반도체 Wafer용 Grinder의 안정화 설계 | - |
dc.title.alternative | Design alterations of a grinder of semiconductor wafer for the improved stability | - |
dc.type | Article | - |
dc.publisher.location | 대한민국 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.16, no.1, pp 91 - 96 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 16 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 91 | - |
dc.citation.endPage | 96 | - |
dc.identifier.kciid | ART002214921 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | Disc surface grinder | - |
dc.subject.keywordAuthor | Dynamic Properties | - |
dc.subject.keywordAuthor | Design Alterations | - |
dc.subject.keywordAuthor | Vibration Control | - |
dc.subject.keywordAuthor | Stability improvement | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
350-27, Gumi-daero, Gumi-si, Gyeongsangbuk-do, Republic of Korea (39253)054-478-7170
COPYRIGHT 2020 Kumoh University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.