내플라즈마성 알루미나 세라믹스 제조 공정
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이현권 | - |
dc.contributor.author | 조경식 | - |
dc.contributor.author | 김미영 | - |
dc.date.available | 2020-04-24T13:26:06Z | - |
dc.date.created | 2020-03-31 | - |
dc.date.issued | 2009 | - |
dc.identifier.issn | 1229-7801 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/2864 | - |
dc.description.abstract | Need for plasma resistant ceramic materials has been continuously increased in semiconductor and display industry requiring plasma processing to realize ultra fine circuit process. Among promising candidates, alumina ceramics have still some advantages with respect to its economic aspect. In this study, fabrication of plasma resistant alumina ceramics was tried, and its processing optimization was also aimed. Careful processing control and thereby uniform microstructure of Al₂O₃ gave rise to enhanced plasma resistance, even comparable to market-governing commercial Al₂O₃. A further study is needed concerning β-Al₂O₃ materials system, presumably playing a decisive role in decreasing plasma resistance of Al₂O₃ ceramics. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 한국세라믹학회 | - |
dc.title | 내플라즈마성 알루미나 세라믹스 제조 공정 | - |
dc.title.alternative | Processing of Plasma Resistant Alumina Ceramics | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 조경식 | - |
dc.identifier.bibliographicCitation | 한국세라믹학회지, v.46, no.4, pp.385 - 391 | - |
dc.citation.title | 한국세라믹학회지 | - |
dc.citation.volume | 46 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 385 | - |
dc.citation.endPage | 391 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART001365881 | - |
dc.description.journalClass | 1 | - |
dc.subject.keywordAuthor | Alumina | - |
dc.subject.keywordAuthor | Plasma resistant | - |
dc.subject.keywordAuthor | Powder processing | - |
dc.subject.keywordAuthor | Microstructure | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
350-27, Gumi-daero, Gumi-si, Gyeongsangbuk-do, Republic of Korea (39253)054-478-7170
COPYRIGHT 2020 Kumoh University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.