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Results 1-1 of 1 (Search time: 0.001 seconds).
Optimal Design of Surface Relief Grating for High-Resolution Two-Photon Interference Lithography
Ahn, Jinseong; Park, Junyong
Article
Issue Date
2022
Citation
ADVANCED THEORY AND SIMULATIONS, v.5, no.6
Publisher
WILEY-V C H VERLAG GMBH
1
Discover
Subject
3-DIMENSIONAL NANOSTRUCTURES
1
ARRAYS
1
FEATURES
1
interference lithography
1
NANOFABRICATION
1
phase masks
1
PHOTONIC CRYSTALS
1
proximity field nanopatterning
1
SINGLE EXPOSURE
1
surface relief grating
1
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Date Issued
2022
1
Type
Article
1
Language
ENG
1
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