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화학기상증착법에 의한 탄소나노튜브의 성장에 미치는 암모니아 가스의 영향
이동구
Article
Issue Date
2010
Citation
전기전자재료학회논문지, v.23, no.5, pp 418 - 423
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한국전기전자재료학회
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이동구
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Ammonia
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