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Ti 쇼트키 배리어 다이오드의 Al 확산 방지를 위한 SC-1 세정 효과
최진석; 최여진;
안성진
Article
Issue Date
2021
Citation
한국재료학회지, v.31, no.2, pp.97 - 100
Publisher
한국재료학회
1
Discover
Author
An, sung jin
1
최여진
1
최진석
1
Subject
Al diffusion
1
SC-1
1
Ti silicide
1
BROWSE
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