Poornaprakash, B.; Puneetha, Peddathimula; Subramanyam, K.; Kwon, Min-Woo; Lee, Dong-Yeon; Reddy, M. Siva Pratap; Sangaraju, Sambasivam; Al-Asbahi, Bandar Ali; Kim, Y. L.
ArticleIssue Date2023CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.161PublisherELSEVIER SCI LTD